Title :
Analyzing UV/Vis/NIR Spectra-Sputtered ZnO:Al Thin-Films—I: Space-Time Depend
Author :
Stadler, Andreas ; Stöllinger, Johannes ; Pachler, Astrid ; Aigner, Gerhard ; Topa, Dan ; Dittrich, Herbert
Author_Institution :
Univ. of Salzburg, Salzburg, Austria
fDate :
5/1/2011 12:00:00 AM
Abstract :
Exact, contact-free and non-destructive optical analysis of semiconducting layers is advantageous for thin-film solar cell applications. A non-numerical theoretical model has been developed to extract approximation-free optical and electrical data from UV/visible (Vis)/near infra-red (NIR) spectra. Special focus has been set on single-layer systems. Approximations for thin-films upon substrates and measurements without integrating sphere are provided. Complex parameter evaluation is provided. This exact data acquisition model provides deeper insight into the process-parameter dependencies of pulsed direct current sputtered, transparent aluminum doped zinc-oxide (ZnO:Al) thin films, upon glass substrates. ZnO:Al thin films have been analyzed with respect to space-time dependencies of the sputter process. Therefore, sputter-depositions have been examined, referring to positions upon the substrate, r, target-substrate distances, dTarSub, and sputter durations, tSp . Results were compared with those of the well-known Keradec/Swanepoel model. The necessity of taking both spectra-transmission and reflection spectra-into account has been shown. Theoretical sputter-concepts were proved and enhanced. A non-contact, optical conductivity measurement possibility by use of UV/Vis/NIR spectroscopy has been provided. Optically evaluated conductivities, σL, were compared with electrically taken values, by a four-tip measurement system.
Keywords :
II-VI semiconductors; aluminium; infrared spectra; optical conductivity; optical variables measurement; semiconductor thin films; solar cells; sputter deposition; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; Keradec-Swanepoel model; NIR spectra analysis; UV spectra analysis; Vis spectra analysis; ZnO:Al; approximation-free optical extraction; data acquisition model; electrical data; four-tip measurement system; glass substrates; near infra-red spectra; noncontact optical conductivity measurement; nondestructive optical analysis; nonnumerical theoretical model; process-parameter dependency; pulsed direct current; reflection spectra; semiconducting layers; single-layer systems; space-time depend; spectra transmission; sputter depositions; sputter durations; sputter process; sputtered ZnO:Al thin-films; target-substrate distances; thin-film solar cell; Absorption; Approximation methods; Equations; Optical reflection; Refractive index; Substrates; Aluminum doped zinc-oxide (ZnO:Al); UV/Vis/NIR; optical conductivity measurement; spectroscopy; sputter-theory;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2011.2109742