Title :
Abnormal Subthreshold Leakage Current at High Temperature in InGaZnO Thin-Film Transistors
Author :
Chang, Geng-Wei ; Chang, Ting-Chang ; Jhu, Jhe-Ciou ; Tsai, Tsung-Ming ; Syu, Yong-En ; Chang, Kuan-Chang ; Tai, Ya-Hsiang ; Jian, Fu-Yen ; Hung, Ya-Chi
Author_Institution :
Dept. of Photonics, Nat. Chiao Tung Univ., Hsinchu, Taiwan
fDate :
4/1/2012 12:00:00 AM
Abstract :
Abnormal subthreshold leakage current is observed at high temperature in amorphous InGaZnO thin-film transistors. The transfer curve exhibits an apparent subthreshold current stretch-out phenomenon that becomes more serious with increasing temperatures. The negative bias temperature instability experiment has been used to prove high-temperature-induced hole generation. Furthermore, the transfer characteristics with different drain voltages have been also used to confirm the status of hole accumulation. These pieces of evidence clearly defined the stretch-out phenomenon, which is caused by thermal-induced hole generation and accumulation at the source region that leads to source-side barrier lowering.
Keywords :
leakage currents; thin film transistors; InGaZnO; abnormal subthreshold leakage current; amorphous thin film transistors; high temperature-induced hole generation; negative bias temperature instability; source-side barrier lowering; thermal-induced hole generation; transfer characteristics; transfer curve; Logic gates; Plasma temperature; Stress; Subthreshold current; Temperature; Thin film transistors; Indium–gallium–zinc–oxide (IGZO); temperature; thermal-induced hole; thin-film transistors (TFTs);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2012.2182754