• DocumentCode
    1443784
  • Title

    Abnormal Subthreshold Leakage Current at High Temperature in InGaZnO Thin-Film Transistors

  • Author

    Chang, Geng-Wei ; Chang, Ting-Chang ; Jhu, Jhe-Ciou ; Tsai, Tsung-Ming ; Syu, Yong-En ; Chang, Kuan-Chang ; Tai, Ya-Hsiang ; Jian, Fu-Yen ; Hung, Ya-Chi

  • Author_Institution
    Dept. of Photonics, Nat. Chiao Tung Univ., Hsinchu, Taiwan
  • Volume
    33
  • Issue
    4
  • fYear
    2012
  • fDate
    4/1/2012 12:00:00 AM
  • Firstpage
    540
  • Lastpage
    542
  • Abstract
    Abnormal subthreshold leakage current is observed at high temperature in amorphous InGaZnO thin-film transistors. The transfer curve exhibits an apparent subthreshold current stretch-out phenomenon that becomes more serious with increasing temperatures. The negative bias temperature instability experiment has been used to prove high-temperature-induced hole generation. Furthermore, the transfer characteristics with different drain voltages have been also used to confirm the status of hole accumulation. These pieces of evidence clearly defined the stretch-out phenomenon, which is caused by thermal-induced hole generation and accumulation at the source region that leads to source-side barrier lowering.
  • Keywords
    leakage currents; thin film transistors; InGaZnO; abnormal subthreshold leakage current; amorphous thin film transistors; high temperature-induced hole generation; negative bias temperature instability; source-side barrier lowering; thermal-induced hole generation; transfer characteristics; transfer curve; Logic gates; Plasma temperature; Stress; Subthreshold current; Temperature; Thin film transistors; Indium–gallium–zinc–oxide (IGZO); temperature; thermal-induced hole; thin-film transistors (TFTs);
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2012.2182754
  • Filename
    6148254