Fabrication and Response of Laser-Printed Cavity-Sealing Membranes

Freestanding micrometer-scale Ag membranes were laser printed via the laser decal transfer process without the use of sacrificial layers. Cross-sectional focused ion beam milling revealed uniform membrane thickness. Material and structural properties, including Young´s modulus E ≈ 40 GPa, residual stress σ₀ ≈ 61 MPa, and yield stress σ^y ≈ 110 MPa, were extracted via a coupled nanoindentation/flnite-element simulation approach. Dynamic characterization of membranes via laser vibrometry confirmed resonant frequencies in the megahertz regime with quality factors comparable to fully dense structures fabricated via traditional lithography.