Title :
Half-symmetric cavity tunable microelectromechanical VCSEL with single spatial mode
Author :
Tayebati, P. ; Peidong Wang ; Vakhshoori, D. ; Chih-Cheng Lu ; Azimi, M. ; Sacks, R.N.
Author_Institution :
CoreTek Inc., Burlington, MA, USA
Abstract :
A new class of microelectromechanically tunable vertical-cavity surface-emitting lasers with a half-symmetric cavity structure is described. The cavity is realized by inducing a curvature (R/spl sim/320 μm) in the top movable dielectric mirror. The microcavity forces lasing oscillations in a single fundamental spatial mode of approximately 6 μm despite the 20 μm electrical aperture of the device. The device wavelength was tunable from 863 to 833 nm under a 13-V voltage swing. The device operates in a single fundamental mode with sidemode supression ratio of >20 dB throughout the tuning range.
Keywords :
electromechanical effects; laser cavity resonators; laser mirrors; laser modes; laser transitions; laser tuning; micromechanical devices; quantum well lasers; surface emitting lasers; symmetry; 13 V; 20 mum; 6 mum; 640 mum; 863 to 833 nm; device wavelength; electrical aperture; fundamental mode; half-symmetric cavity structure; half-symmetric cavity tunable microelectromechanical VCSEL; laser tuning range; lasing oscillations; microcavity forces; microelectromechanically tunable vertical-cavity surface-emitting lasers; sidemode supression ratio; single fundamental spatial mode; single spatial mode; top movable dielectric mirror; voltage swing; Apertures; Dielectrics; Laser modes; Laser tuning; Microcavities; Mirrors; Surface emitting lasers; Tunable circuits and devices; Vertical cavity surface emitting lasers; Voltage;
Journal_Title :
Photonics Technology Letters, IEEE
