Title :
Integrated micro-electro-mechanical sensor development for inertial applications
Author :
Allen, J.J. ; Kinney, R.D. ; Sarsfield, J. ; Daily, M.R. ; Ellis, J.R. ; Smith, J.H. ; Montague, S. ; Howe, R.T. ; Boser, B.E. ; Horowitz, R. ; Pisano, A.P. ; Lemkin, M.A. ; Clark, W.A. ; Juneau, T.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
11/1/1998 12:00:00 AM
Abstract :
Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers
Keywords :
CMOS integrated circuits; accelerometers; integrated circuit technology; microsensors; CMOS; M3EMS; Sandia M3EMS fabrication; Si; electronic sensing circuitry; inertial applications; inertial instruments; integrated micro-electro-mechanical sensor; micromachined accelerometers; tests; Accelerometers; CMOS process; CMOS technology; Fabrication; Instruments; Laboratories; Manufacturing processes; Microelectromechanical systems; Microelectronics; Micromechanical devices;
Journal_Title :
Aerospace and Electronic Systems Magazine, IEEE
