DocumentCode
1446717
Title
Determination of Dominant-Yield-Loss Mechanism with Volume Diagnosis
Author
Sharma, Manish ; Schuermyer, Chris ; Benware, Brady
Volume
27
Issue
3
fYear
2010
Firstpage
54
Lastpage
61
Abstract
The cost and cycle time for determining the root cause of yield loss continues to increase as semiconductor technology scales down. A new technique, Axiom, helps yield and product engineers determine the root cause of loss directly from diagnosis results. Consequently, root-cause cycle time is dramatically reduced, resulting in a higher physical-failure analysis success rate and reduced costs.
Keywords
failure analysis; semiconductor device manufacture; dominant-yield-loss mechanism determination; physical-failure analysis success rate; semiconductor technology; volume diagnosis; Axiom; design and test; diagnosis-driven yield analysis; test failure data; yield loss;
fLanguage
English
Journal_Title
Design & Test of Computers, IEEE
Publisher
ieee
ISSN
0740-7475
Type
jour
DOI
10.1109/MDT.2009.94
Filename
5255187
Link To Document