• DocumentCode
    1446717
  • Title

    Determination of Dominant-Yield-Loss Mechanism with Volume Diagnosis

  • Author

    Sharma, Manish ; Schuermyer, Chris ; Benware, Brady

  • Volume
    27
  • Issue
    3
  • fYear
    2010
  • Firstpage
    54
  • Lastpage
    61
  • Abstract
    The cost and cycle time for determining the root cause of yield loss continues to increase as semiconductor technology scales down. A new technique, Axiom, helps yield and product engineers determine the root cause of loss directly from diagnosis results. Consequently, root-cause cycle time is dramatically reduced, resulting in a higher physical-failure analysis success rate and reduced costs.
  • Keywords
    failure analysis; semiconductor device manufacture; dominant-yield-loss mechanism determination; physical-failure analysis success rate; semiconductor technology; volume diagnosis; Axiom; design and test; diagnosis-driven yield analysis; test failure data; yield loss;
  • fLanguage
    English
  • Journal_Title
    Design & Test of Computers, IEEE
  • Publisher
    ieee
  • ISSN
    0740-7475
  • Type

    jour

  • DOI
    10.1109/MDT.2009.94
  • Filename
    5255187