• DocumentCode
    1448758
  • Title

    Electrostatic suspension of dielectrics

  • Author

    Jeon, Jong Up ; Higuchi, Toshiro

  • Author_Institution
    Micro Syst. Lab., Samsung Adv. Inst. of Technol., Kyounggi, South Korea
  • Volume
    45
  • Issue
    6
  • fYear
    1998
  • fDate
    12/1/1998 12:00:00 AM
  • Firstpage
    938
  • Lastpage
    946
  • Abstract
    This paper reports the successful electrostatic suspension of dielectric materials. In order to implement a stable suspension, the electrostatic forces exerted on a dielectric are actively controlled on the basis of the measured suspension gap lengths. The principle of electrostatic force generation for dielectrics is different from that for conductors. By utilizing a stator electrode pattern containing many boundaries over which potential differences exist, the suspension characteristics, such as dynamic stability, suspension initiation time and stiffness of lateral motion are greatly improved. The dynamic model of the suspension system and the influence of the resistivity of a dielectric on the closed-loop stability are described, followed by the experimental apparatus and stabilizing controller. As dielectric objects, glass plates have been suspended electrostatically at a gap length of about 0.3 mm. Apart from the structure of the stator electrode, the suspension initiation time is also influenced by air humidity, glass type, supplied voltage and gap length, which have been experimentally explored. Experimental results on the lateral dynamic characteristics are also presented
  • Keywords
    dielectric materials; electrodes; electrostatic devices; electrostatics; 0.3 mm; closed-loop stability; dielectric materials; dynamic stability; electrostatic force generation; electrostatic forces; electrostatic suspension; glass plates; lateral motion stiffness; stator electrode pattern; suspension gap lengths; suspension initiation time; Dielectric materials; Dielectric measurements; Electrodes; Electrostatic measurements; Force control; Force measurement; Glass; Length measurement; Stability; Stators;
  • fLanguage
    English
  • Journal_Title
    Industrial Electronics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0046
  • Type

    jour

  • DOI
    10.1109/41.735338
  • Filename
    735338