DocumentCode
1448808
Title
Pull-in study of an electrostatic torsion microactuator
Author
Degani, Ofir ; Socher, Eran ; Lipson, Ariel ; Lejtner, T. ; Setter, Dan J. ; Kaldor, Shmuel ; Nemirovsky, Yael
Author_Institution
Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel
Volume
7
Issue
4
fYear
1998
fDate
12/1/1998 12:00:00 AM
Firstpage
373
Lastpage
379
Abstract
Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. In this paper, pull-in analysis is presented for an electrostatic torsion microactuator. The torsion microactuator can be used as a microtorsion mirror. A polynomial algebraic equation for the pull-in voltage and pull-in angle of a torsion microactuator is derived. Two types of microactuators fabricated using bulk micromachining are presented. Measurements done on the fabricated microactuators are reported, showing deviations within 1% error from the calculations
Keywords
electrostatic actuators; micromachining; polynomials; torsion; bulk micromachining; electrostatic torsion microactuator; microtorsion mirror; polynomial algebraic equation; pull-in analysis; Electrostatic actuators; Electrostatic analysis; Electrostatic measurements; Equations; Microactuators; Micromachining; Mirrors; Polynomials; Torque; Voltage;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.735344
Filename
735344
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