Title :
Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication
Author :
Maruo, Shoji ; Kawata, Satoshi
Author_Institution :
Dept. of Appl. Phys., Osaka Univ., Japan
fDate :
12/1/1998 12:00:00 AM
Abstract :
We present three-dimensional (3-D) microstructures fabricated from photopolymerizable resin with a resolution of 0.62 μm. The method used to fabricate such small structures has been developed using a femto-second-pulsed near-infrared (IR) laser. Structures such as microcoils and microtubes are presented which demonstrate the effectiveness of our method. In this method, a two-photon absorption process is successfully utilized to confine the solidification of photopolymerizable resin to the focused spot of the laser, which is possible due to the quadratic dependence of the two-photon absorption rate on light intensity. The experimental system, experimental conditions, and related issues for this novel method of photopolymerization are also discussed
Keywords :
laser materials processing; micromachining; photochemistry; polymerisation; two-photon processes; 0.62 micron; femtosecond pulsed near infrared laser; microcoil; microtube; photopolymerization; resin; solidification; three-dimensional microfabrication; two photon absorption; Electromagnetic wave absorption; Focusing; Laser beams; Microscopy; Optical materials; Physics; Resins; Stereolithography; Surface emitting lasers; Ultrafast optics;
Journal_Title :
Microelectromechanical Systems, Journal of
