Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

Author

Samper, V.D. ; Sangster, A.J. ; Wallrabe, U. ; Reuben, R.L. ; Grund, J.K.

Author_Institution

Dept. of Comput. & Electr. Eng., Heriot-Watt Univ., Edinburgh, UK

Volume

7

Issue

4

fYear

1998

fDate

12/1/1998 12:00:00 AM

Firstpage

423

Lastpage

427

Abstract

This work concerns the alleviation of friction in a novel design of multistator electrostatic wobble motor. The output torque and the kinematic accuracy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been developed using an advanced LIGA technique to integrate polymethylmethacrylate (PMMA) cylinders into nickel micro structures. A new version of the micromotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing stabilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes

Keywords

LIGA; electrostatic motors; machine bearings; sliding friction; LIGA technology; Ni; PMMA cylinder; electrostatic bearing; kinematics; liquid environment; multistator electrostatic wobble motor; nickel microstructure; rotor; sliding friction; stator electrode sealing; torque; wobble micromotor; Electrodes; Electrostatics; Engine cylinders; Friction; Kinematics; Micromotors; Nickel; Rotors; Stators; Torque;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.735351

Filename

735351