DocumentCode
1448872
Title
Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique
Author
Nakano, Masaki ; Song, Jae Man ; Fukunaga, Hirotoshi ; Matsuo, Yoshio
Author_Institution
Dept. of Electr. & Electron. Eng., Nagasaki Univ., Japan
Volume
36
Issue
5
fYear
2000
fDate
9/1/2000 12:00:00 AM
Firstpage
2927
Lastpage
2929
Abstract
A laser ablation technique contained with a shadow mask in Ar atmosphere enables us to obtain crystalline ferrite thin films on glass substrates at room temperature. Investigations on the Ar pressure, PAr, and the distance between the shadow mask from the target, L1, were carried out. The optimum conditions for forming the spinel structure of Mn-Zn ferrite were PAr=20 mTorr and L1=20 mm, respectively
Keywords
ferrites; magnetic thin films; manganese compounds; pulsed laser deposition; zinc compounds; 20 C; 20 mm; 20 mtorr; Ar; Ar atmosphere; Mn-Zn ferrite; MnZnFe2O4; crystalline Mn-Zn ferrite thin films; crystalline ferrite thin films; glass substrates; laser ablation technique; room temperature; room temperature growth; shadow mask; spinel structure; Argon; Atmosphere; Crystallization; Ferrite films; Glass; Laser ablation; Magnetic films; Magnetic properties; Substrates; Temperature;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.908630
Filename
908630
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