Title :
Effects of a Pt underlayer and interlayer on the growth texture of strontium ferrite thin films
Author :
Zhuang, Zailong ; Bian, Bo ; White, Robert M. ; Laughlin, David E.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
9/1/2000 12:00:00 AM
Abstract :
The effects of a Pt underlayer and a Pt interlayer on the textured growth of the sputtered strontium ferrite (SrM) films were investigated. The structural and magnetic properties of SrM films on the Pt underlayers were compared with SrM films on thermally oxidized Si substrates. It was found that much better (001) texture was obtained on the films with Pt underlayers, as indicated by the strong (006), (008) and (0014) reflections from X-ray diffraction (XRD) measurement. A Pt interlayer was also found to further improve the (001) texture
Keywords :
ferrites; magnetic thin films; magnetisation; sputter deposition; strontium compounds; texture; (001) texture; Pt; Pt interlayer; Pt underlayer; Si; SrFe2O4; X-ray diffraction; growth texture; interlayer; magnetic properties; sputtered strontium ferrite; strontium ferrite thin films; structural properties; textured growth; thermally oxidized Si substrates; Ferrite films; Magnetic films; Optical films; Reflection; Semiconductor films; Sputtering; Strontium; Substrates; X-ray diffraction; X-ray scattering;
Journal_Title :
Magnetics, IEEE Transactions on
