Title :
Implantation of heavy ions in magneto optical multilayers and alloys
Author :
Hubenthal, Frank ; Röll, Klaus ; Stobiecki, Feliks
Author_Institution :
Kassel Univ., Germany
fDate :
9/1/2000 12:00:00 AM
Abstract :
This paper presents the influence of ion implantation and subsequent annealing on magneto optical multilayers of Tb-Fe and alloys of TbFeCo. The layers are prepared by sputtering and have a perpendicular magnetic anisotropy (PMA). After the implantation of heavy ions the PMA changes in dependence on the ion fluence to the in-plane state and effects the stresses in the alloy layers
Keywords :
annealing; cobalt alloys; ferromagnetic materials; internal stresses; ion implantation; iron alloys; magnetic multilayers; magneto-optical effects; optical multilayers; perpendicular magnetic anisotropy; sputter deposition; terbium alloys; Tb-Fe; TbFe; TbFeCo; alloys; annealing; heavy ions; in-plane state; ion fluence; ion implantation; magneto optical multilayers; perpendicular magnetic anisotropy; sputtering; stresses; Iron; Magnetic anisotropy; Magnetic films; Magnetic hysteresis; Magnetosphere; Optical films; Optical interferometry; Optical superlattices; Perpendicular magnetic anisotropy; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
