Title :
A Lens Holder in Conjunction With a MEMS Platform for On-Chip Aligning and Fixing of a Ball Lens in Silicon Photonics Packaging
Author :
Zhang, Qing Xin ; Du, Yu ; Tan, Chee Wei ; Zhang, Jing ; Yu, Ming Bin ; Lo, Guo-Qiang ; Kwong, Dim-Lee
Author_Institution :
Inst. of Microelectron., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore
fDate :
5/1/2011 12:00:00 AM
Abstract :
This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail.
Keywords :
electronics packaging; elemental semiconductors; integrated optics; lenses; micro-optomechanical devices; optical design techniques; optical fabrication; silicon; MEMS lens; Si; lens holder; mechanical fixing; microelectromechanical system; on-chip aligning; optical ball lens; silicon photonics packaging; size 300 mum; Lenses; Micromechanical devices; Optical coupling; Photonics; Silicon; Springs; Suspensions; Active alignment; Si-photonics; lens holder; mechanical locking; microelectromechanical system (MEMS); packaging;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2011.2114877
