A Lens Holder in Conjunction With a MEMS Platform for On-Chip Aligning and Fixing of a Ball Lens in Silicon Photonics Packaging

Author

Zhang, Qing Xin ; Du, Yu ; Tan, Chee Wei ; Zhang, Jing ; Yu, Ming Bin ; Lo, Guo-Qiang ; Kwong, Dim-Lee

Author_Institution

Inst. of Microelectron., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore

Volume

23

Issue

9

fYear

2011

fDate

5/1/2011 12:00:00 AM

Firstpage

588

Lastpage

590

Abstract

This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail.

Keywords

electronics packaging; elemental semiconductors; integrated optics; lenses; micro-optomechanical devices; optical design techniques; optical fabrication; silicon; MEMS lens; Si; lens holder; mechanical fixing; microelectromechanical system; on-chip aligning; optical ball lens; silicon photonics packaging; size 300 mum; Lenses; Micromechanical devices; Optical coupling; Photonics; Silicon; Springs; Suspensions; Active alignment; Si-photonics; lens holder; mechanical locking; microelectromechanical system (MEMS); packaging;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2011.2114877

Filename

5713233