Title :
Magnetic properties of NdFeB thin film obtained by diffusion annealing
Author :
Kim, Mhan-joong ; Li, Ying ; Kim, Yoon-bae ; Ryu, Kwon-sang ; Song, Chang-bin ; Kim, Chong-Oh ; Kim, Taik-Kee
Author_Institution :
Korea Res. Inst. of Stand. & Sci., Taejon, South Korea
fDate :
9/1/2000 12:00:00 AM
Abstract :
The magnetic properties and microstructure of diffusion annealed [Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The NdFeB films were deposited on Si substrates by the magnetron sputtering method. The high coercivity NdFeB films were obtained by diffusion of Nd/NdFeB layers into films at 620°C for 10 minutes. The films with the thickness ratio of Nd/NdFeB ⩾1 show good hard magnetic properties with high coercivity of about 20 kOe
Keywords :
annealing; boron alloys; coercive force; crystal microstructure; diffusion; ferromagnetic materials; iron alloys; magnetic multilayers; magnetic thin films; neodymium alloys; permanent magnets; sputtered coatings; 10 min; 620 degC; Nd; NdFeB; NdFeB thin film; Si; Si substrates; Ta; Ta/Nd/NdFeB/Nd/Ta thin films; diffusion; diffusion annealing; film magnet; hard magnetic properties; high coercivity; magnetic properties; magnetron sputtering method; microstructure; multilayers; thickness ratio; Annealing; Iron; Magnetic films; Magnetic properties; Microstructure; Neodymium; Optical films; Semiconductor films; Sputtering; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
