DocumentCode :
1450440
Title :
Transient measurements of SOI body contact effectiveness
Author :
Sleight, Jeffrey W. ; Mistry, Kaizad R. ; Antoniadis, Dimitri A.
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Volume :
19
Issue :
12
fYear :
1998
Firstpage :
499
Lastpage :
501
Abstract :
A technique for characterizing the effectiveness of SOI MOSFET body contacts under transient conditions, by measuring the transient lateral bipolar current in a SOI pass gate, is demonstrated. Using this technique, the minimum rise or fall edge rate required to guarantee that the body potential over the device width follows the contact potential is defined. While this technique is applied specifically to a Schottky body tie, it can be generalized to other technologies and other body ties.
Keywords :
MOSFET; contact potential; semiconductor device measurement; silicon-on-insulator; SOI MOSFET body contact; Schottky body tie; body potential; contact potential; lateral bipolar current; pass gate; transient measurement; Charge measurement; Contact resistance; Current measurement; Electrical resistance measurement; Immune system; Length measurement; MOSFET circuits; Silicon on insulator technology; Thickness measurement; Voltage;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/55.735759
Filename :
735759
Link To Document :
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