Title :
Transient measurements of SOI body contact effectiveness
Author :
Sleight, Jeffrey W. ; Mistry, Kaizad R. ; Antoniadis, Dimitri A.
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
A technique for characterizing the effectiveness of SOI MOSFET body contacts under transient conditions, by measuring the transient lateral bipolar current in a SOI pass gate, is demonstrated. Using this technique, the minimum rise or fall edge rate required to guarantee that the body potential over the device width follows the contact potential is defined. While this technique is applied specifically to a Schottky body tie, it can be generalized to other technologies and other body ties.
Keywords :
MOSFET; contact potential; semiconductor device measurement; silicon-on-insulator; SOI MOSFET body contact; Schottky body tie; body potential; contact potential; lateral bipolar current; pass gate; transient measurement; Charge measurement; Contact resistance; Current measurement; Electrical resistance measurement; Immune system; Length measurement; MOSFET circuits; Silicon on insulator technology; Thickness measurement; Voltage;
Journal_Title :
Electron Device Letters, IEEE