• DocumentCode
    1450517
  • Title

    Soft magnetic properties and microstructure of high moment Fe-N-Al-O films for recording heads

  • Author

    Ikeda, Shoji ; Uehara, Yuji ; Tagawa, Ikuya ; Takeguchi, Naoki ; Kakehi, Masahiro

  • Author_Institution
    Fujitsu Labs. Ltd., Atsugi, Japan
  • Volume
    36
  • Issue
    5
  • fYear
    2000
  • fDate
    9/1/2000 12:00:00 AM
  • Firstpage
    3470
  • Lastpage
    3472
  • Abstract
    Fe-N-Al-O alloy films were fabricated by RF reactive sputtering in a mixed Ar+N2 plasma. The Al and O contents in films were varied by the area ratio of Al2O3 chips placed on an Fe target. We examined the effects of additional elements, such as Al and O, on magnetic and electrical properties of the Fe-N-Al-O films, and we investigated the relationship between soft magnetic properties and microstructure. The permeability reaches a maximum of about 1800, when the Al+O content range is 10-16 at%
  • Keywords
    crystal microstructure; electrical resistivity; iron compounds; magnetic heads; magnetic permeability; magnetic recording; magnetic thin films; magnetisation; nitrogen compounds; soft magnetic materials; sputtered coatings; FeNAlO; RF reactive sputtering; electrical resistivity; high moment films; magnetic properties; microstructure; permeability; recording heads; saturation magnetization; soft magnetic properties; Conductivity; Iron; Magnetic films; Magnetic heads; Magnetic materials; Magnetic properties; Magnetic recording; Microstructure; Saturation magnetization; Soft magnetic materials;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.908863
  • Filename
    908863