Application of bi-directional thin-film micro wire array to RF integrated spiral inductors

Author

Yamaguchi, M. ; Suezawa, K. ; Baba, M. ; Arai, K.I. ; Shimada, Y. ; Tanabe, S. ; Itoh, K.

Author_Institution

Inst. of Electr. & Commun. Eng., Tohoku Univ., Sendai, Japan

Volume

36

Issue

5

fYear

2000

fDate

9/1/2000 12:00:00 AM

Firstpage

3514

Lastpage

3517

Abstract

Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space=9 μm/2 μm, an RF integrated inductor exhibited L=7.5 nH(+11% of air core´s), R=7.6 Ω and Q=6.3 (almost same as the air core´s)

Keywords

Q-factor; cobalt alloys; coercive force; ferromagnetic materials; inductors; magnetic annealing; magnetic domains; magnetic hysteresis; magnetic permeability; magnetostrictive devices; niobium alloys; wires (electric); zirconium alloys; CoNbZr; RF integrated spiral inductors; annealing; bi-directional thin-film micro wire array; coercive force; domain pattern; horizontally aligned micro wire arrays; magnetic hard axis; micro-fabrication; permeability; vertically aligned micro wire arrays; zero-magnetostrictive film; Annealing; Bidirectional control; Coercive force; Magnetic cores; Magnetic domains; Magnetic films; Permeability; Radio frequency; Transistors; Wire;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.908879

Filename

908879