Miniaturization of high-frequency carrier-type thin-film magnetic field sensor using laminated film

Author

Takezawa, M. ; Kikuchi, H. ; Yamaguchi, M. ; Arai, K.I.

Author_Institution

Dept. of Electr. Eng., Kyushu Inst. of Technol., Kitakyushu, Japan

Volume

36

Issue

5

fYear

2000

fDate

9/1/2000 12:00:00 AM

Firstpage

3664

Lastpage

3666

Abstract

We examined a laminated high-frequency carrier-type thin-film magnetic field sensor that consists of CoNbZr soft magnetic films with Nb nonmagnetic conductive interlayer. The lamination can change domain structure of the sensor and obtain high sensitivity. An impedance change of 6 Ω and a gain of 43 kΩ/T was achieved when the length of the laminated sensor was 1 mm. The gain is four times larger than that of a monolayer sensor

Keywords

amorphous magnetic materials; cobalt alloys; electric impedance; giant magnetoresistance; induced anisotropy (magnetic); laminates; magnetic domains; magnetic heads; magnetic multilayers; magnetic sensors; magnetic thin films; metallic glasses; niobium; niobium alloys; soft magnetic materials; zirconium alloys; CoNbZr-Nb-CoNbZr; amorphous film; demagnetizing field; domain structure; giant magnetoimpedance; high sensitivity; high-frequency carrier-type; impedance change; induced uniaxial anisotropy; laminated film; magnetic head; nonmagnetic conductive interlayer; sensor miniaturization; soft magnetic films; thin-film magnetic field sensor; trilayer film; Conductive films; Demagnetization; Impedance; Lamination; Magnetic anisotropy; Magnetic films; Magnetic sensors; Niobium; Strips; Thin film sensors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.908934

Filename

908934