Title :
Fabrication and characterization of CoZrGd Hall sensors
Author :
Ye, Wei ; Scala, Philip ; Lin, Ko-Wei ; Gambino, R.J.
Author_Institution :
Dept. of Mater. Sci. & Eng., State Univ. of New York, Stony Brook, NY, USA
fDate :
9/1/2000 12:00:00 AM
Abstract :
Thin films of the amorphous ternary alloy CoZrGd are deposited by single target magnetron RF sputtering. The Hall effect was studied as a function of Gd percentage. The amorphous films show unusually large spontaneous Hall effect, whose sign is strongly dependent on the film composition, as explained by the model of McGuire et al. Also, the films display perpendicular easy axis anisotropy, which significantly reduces the field needed to obtain technical saturation of the spontaneous Hall effect. Thus the sensitivity of the films can be substantially increased. The highest magnetic field sensitivity (-14.8%/Tesla) is accomplished with Hall angle (ρH/ρ) of -2.07% at a saturation field of 0.14 Tesla. This film has potential application in small fields
Keywords :
Hall effect; Hall effect transducers; amorphous magnetic materials; cobalt alloys; gadolinium alloys; magnetic field measurement; magnetic sensors; magnetic thin film devices; magnetic thin films; perpendicular magnetic anisotropy; sputter deposition; sputtered coatings; zirconium alloys; CoZrGd; Hall sensors; amorphous ternary alloy; amorphous thin films; film composition dependence; large spontaneous Hall effect; magnetic field sensitivity; perpendicular easy axis anisotropy; saturation field; sensor fabrication; single target magnetron RF sputter deposition; small fields; Amorphous magnetic materials; Amorphous materials; Fabrication; Hall effect; Magnetic anisotropy; Magnetic films; Magnetic sensors; Perpendicular magnetic anisotropy; Sensor phenomena and characterization; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
