Title :
Formation of hollow glass microcylinders on silicon
Author :
Krishnaswamy, M. ; McMullin, J.N. ; Keyworth, B.P. ; Broughton, J.N.
fDate :
10/24/1996 12:00:00 AM
Abstract :
10 μm diameter hollow cylinders up to 1 cm long have been formed from sputtered glass on silicon. Ridges with rectangular cross-sections were etched from the glass and reformed into hollow cylinders upon annealing. Potential applications are integrated optics, optoelectronic device cooling micro gas/fluid transport, and chemical and biomedical analysis
Keywords :
annealing; etching; glass; integrated optics; micromachining; optical fabrication; sputtered coatings; 1 cm; 10 micron; Si; annealing; biomedical analysis; chemical analysis; etching; fabrication; hollow glass microcylinder; integrated optics; micro fluid transport; micro gas transport; optoelectronic device cooling; rectangular cross-section; ridge; silicon substrate; sputtering;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19961398
