Title :
Electron beam extraction from a broad-beam vacuum-arc metal plasma source
Author :
Oks, Efim M. ; Brown, Ian G.
Author_Institution :
Inst. of High-Current Electron., Acad. of Sci., Tomsk, Russia
fDate :
10/1/1998 12:00:00 AM
Abstract :
We describe experiments demonstrating the formation of a high current electron beam from a vacuum arc plasma. A preexisting vacuum arc ion source was used, with the extraction voltage reversed in polarity so as to form an electron beam rather than an ion beam; no other changes were required. The beam formed was of energy up to 33 keV, beam current up to 70 A, beam diameter about 10 cm, pulse width 500 μs, and energy density up to 25 J/cm2. This kind of source can be used for material surface modification
Keywords :
electron beams; plasma production; vacuum arcs; 33 keV; 70 A; broad-beam vacuum-arc metal plasma source; electron beam extraction; energy density; high current electron beam; material surface modification; preexisting vacuum arc ion source; Cathodes; Electron beams; Ion sources; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma sources; Structural beams; Surface resistance; Vacuum arcs;
Journal_Title :
Plasma Science, IEEE Transactions on
