Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations

Author

Pender, J.T.P. ; Brake, M.L.

Author_Institution

Dept. of Nucl. Eng. & Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

26

Issue

5

fYear

1998

fDate

10/1/1998 12:00:00 AM

Firstpage

1583

Lastpage

1585

Abstract

A zero-dimensional model quickly estimates changes in species concentrations in CF₄ radio frequency glow discharges. The code simulated experimental conditions of 100 mtorr and 5-20 W discharges. The results show that the simple model predicts actinometry results if the most accurate electron energy distribution function is used

Keywords

chemical analysis; glow discharges; high-frequency discharges; organic compounds; plasma materials processing; plasma simulation; radiometry; sputter etching; 100 mtorr; 5 to 20 W; F; F concentrations; actinometry results; carbon tetrafluoride; code simulated experimental conditions; electron energy distribution function; fast zero-dimensional simulation; radio frequency glow discharges; simple model; species concentration; tetrafluoromethane; zero-dimensional model; Argon; Differential equations; Etching; Frequency estimation; Glow discharges; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma simulation; Radio frequency;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.736067

Filename

736067