Title :
Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations
Author :
Pender, J.T.P. ; Brake, M.L.
Author_Institution :
Dept. of Nucl. Eng. & Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
10/1/1998 12:00:00 AM
Abstract :
A zero-dimensional model quickly estimates changes in species concentrations in CF4 radio frequency glow discharges. The code simulated experimental conditions of 100 mtorr and 5-20 W discharges. The results show that the simple model predicts actinometry results if the most accurate electron energy distribution function is used
Keywords :
chemical analysis; glow discharges; high-frequency discharges; organic compounds; plasma materials processing; plasma simulation; radiometry; sputter etching; 100 mtorr; 5 to 20 W; F; F concentrations; actinometry results; carbon tetrafluoride; code simulated experimental conditions; electron energy distribution function; fast zero-dimensional simulation; radio frequency glow discharges; simple model; species concentration; tetrafluoromethane; zero-dimensional model; Argon; Differential equations; Etching; Frequency estimation; Glow discharges; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma simulation; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
