DocumentCode
1454032
Title
Scanning near-field millimeter-wave microscopy using a metal slit as a scanning probe
Author
Nozokido, Tatsuo ; Bae, Jongsuck ; Mizuno, Koji
Author_Institution
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Volume
49
Issue
3
fYear
2001
fDate
3/1/2001 12:00:00 AM
Firstpage
491
Lastpage
499
Abstract
In this paper, a novel type of scanning near-field millimeter-wave microscopy using a metal slit-type probe is proposed. A tapered reduced-height rectangular waveguide forms the slit aperture, which has a width much smaller than one wavelength λ and length of the order of λ. The slit probe can be operated in the TE10 mode and, thus, results in high transmission efficiency, even when the width is exceedingly small. An image reconstruction algorithm based on computerized tomographic imaging is used to obtain two-dimensional near-field images. Experiments performed at 60 GHz (λ=5 mm) show that image resolution equal to the slit width (~80 μm) is achieved. As an application of this scanning slit microscopy, visualization of transition phenomena of photoexcited free carriers in silicon have been successfully demonstrated, yielding useful information on the dynamics of free carriers in semiconductor materials
Keywords
computerised tomography; image reconstruction; integrated circuit measurement; millimetre wave measurement; probes; rectangular waveguides; scanning probe microscopy; 5 mm; 60 GHz; 80 micron; Si; TE10 mode; computerized tomographic imaging; free carrier dynamics; image reconstruction algorithm; metal slit; photoexcited free carriers; scanning near-field millimeter-wave microscopy; scanning probe; scanning slit microscopy; slit probe; tapered reduced-height rectangular waveguide; transition phenomena; transmission efficiency; two-dimensional near-field images; Apertures; Application software; High-resolution imaging; Image reconstruction; Image resolution; Microscopy; Probes; Rectangular waveguides; Tellurium; Tomography;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/22.910553
Filename
910553
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