DocumentCode :
1454341
Title :
Characterization of Contact Resistance Stability in MEM Relays With Tungsten Electrodes
Author :
Chen, Yenhao ; Nathanael, Rhesa ; Jeon, Jaeseok ; Yaung, Jack ; Hutin, Louis ; Liu, Tsu-Jae King
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
Volume :
21
Issue :
3
fYear :
2012
fDate :
6/1/2012 12:00:00 AM
Firstpage :
511
Lastpage :
513
Abstract :
The impact of device operating parameters on the ON-state resistance (RON) of microelectromechanical relays with tungsten (W) electrodes is reported. Due to the susceptibility of W to oxidation, RON increases undesirably over the device operating cycles. This issue is aggravated by Joule heating when the relay is in the on state. The experimental results confirm that shorter ON time, as well as shorter off time, provides for more stable RON with respect to the number of ON/OFF switching cycles.
Keywords :
contact resistance; electrodes; micromechanical devices; microrelays; oxidation; tungsten; Joule heating; MEM relays; W; contact resistance stability; microelectromechanical relays; on-state resistance; oxidation; tungsten electrodes; Circuit stability; Electrodes; Oxidation; Relays; Resistance; Switches; Tungsten; Contact resistance; MEM switch; microelectromechanical (MEM) relay; stability;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2012.2186282
Filename :
6156410
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1454341
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