• DocumentCode
    1454482
  • Title

    An implanted-emitter 4H-SiC bipolar transistor with high current gain

  • Author

    Tang, Yi ; Fedison, Jefferey B. ; Chow, T.P.

  • Author_Institution
    Center for Integrated Electron. & Electron. Manuf., Rensselaer Polytech. Inst., Troy, NY, USA
  • Volume
    22
  • Issue
    3
  • fYear
    2001
  • fDate
    3/1/2001 12:00:00 AM
  • Firstpage
    119
  • Lastpage
    120
  • Abstract
    An epi-base, implanted-emitter, npn bipolar transistor which showed a maximum common emitter current gain (/spl beta/) of /spl sim/40, the highest current gain reported for BJT in any polytype of SiC has been experimentally demonstrated in 4H-SiC. The forward drop was /spl sim/1 V at forward current density of 50 A/cm/sup 2/. The current gain decreases hence specific on-resistance increases with increasing temperature. The negative temperature coefficient of /spl beta/ makes the device attractive for paralleling and for preventing thermal runaways.
  • Keywords
    bipolar transistors; ion implantation; silicon compounds; wide band gap semiconductors; 4H-SiC bipolar transistor; SiC; current gain; epi-base implanted-emitter n-p-n BJT; forward current density; forward voltage drop; specific on-resistance; temperature coefficient; Annealing; Bipolar transistors; Current control; Current density; Doping; Implants; MOSFETs; Power semiconductor devices; Silicon carbide; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.910614
  • Filename
    910614