DocumentCode
1454988
Title
The broad sweep of integrated microsystems
Author
Picraux, S. Tom ; Mcwhorter, Paulj
Author_Institution
Phys. & Chem. Sci. Center, Sandia Nat. Labs., Albuquerque, NM, USA
Volume
35
Issue
12
fYear
1998
fDate
12/1/1998 12:00:00 AM
Firstpage
24
Lastpage
33
Abstract
Micromachining mechanical, chemical, and optical components onto the same wafers as electronic circuits produces powerful systems that can understand and influence their environments
Keywords
micromechanical devices; chemical component; electronic circuit; integrated microsystem; mechanical component; micromachining; optical component; silicon wafer; Consumer electronics; Control systems; Industrial electronics; Instruments; Optical sensors; Sensor arrays; Sensor systems; Silicon; Temperature control; Thermal sensors;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/6.736447
Filename
736447
Link To Document