Title :
The broad sweep of integrated microsystems
Author :
Picraux, S. Tom ; Mcwhorter, Paulj
Author_Institution :
Phys. & Chem. Sci. Center, Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
12/1/1998 12:00:00 AM
Abstract :
Micromachining mechanical, chemical, and optical components onto the same wafers as electronic circuits produces powerful systems that can understand and influence their environments
Keywords :
micromechanical devices; chemical component; electronic circuit; integrated microsystem; mechanical component; micromachining; optical component; silicon wafer; Consumer electronics; Control systems; Industrial electronics; Instruments; Optical sensors; Sensor arrays; Sensor systems; Silicon; Temperature control; Thermal sensors;
Journal_Title :
Spectrum, IEEE
