Title :
Optoelectronic on-chip characterization of ultrafast electric devices: Measurement techniques and applications
Author :
Pfeifer, Torsten ; Heiliger, Hanns-Michael ; Löffler, Torsten ; Ohlhoff, Carsten ; Meyer, Christoph ; Lüpke, Gunter ; Roskos, Hartmut G. ; Kurz, Heinrich
Author_Institution :
Inst. fur Halbleitertechnik II, Rheinisch-Westfalisches Tech. Hochschule, Aachen, Germany
fDate :
9/1/1996 12:00:00 AM
Abstract :
A comprehensive description of a modular optoelectronic measurement system for the characterization of high-frequency microelectronic devices and circuits is presented. Depending on application, specific techniques to generate, synchronize to, and detect high-frequency electric signals are combined covering a frequency range of more than three orders of magnitudes from 2 to 4000 GHz. We discuss on-chip electric-pulse generation by freely positionable photoconductive probes and by direct optical excitation of active devices. Alternatively, for measurements with external, electronically generated signals, the system is laid out to lock onto periodic signals of arbitrary frequency employed as clock signal for the circuit under test. With respect to detection, the following approaches are discussed: sampling with freely positionable electrooptic and photoconductive probe tips, and truly (probe-tip-free) all-optical testing based on the field-dependent optical nonlinearity of the circuit´s substrate material. The probes are characterized concerning time resolution, linearity, sensitivity, and invasiveness. We demonstrate with a number of examples that the combination of the various modules allows one to optimize the approach to a specific testing problem. Measurements of the linear and nonlinear behavior of active and passive devices as well as circuits are presented. The electric field, respectively potential, is measured locally (point measurements) or in its spatial distribution (field mapping) both in the near and far field
Keywords :
MMIC; electric field measurement; electro-optical devices; integrated circuit testing; microwave devices; microwave measurement; millimetre wave devices; millimetre wave measurement; nonlinear optics; photoconducting devices; semiconductor device testing; signal sampling; submillimetre wave devices; submillimetre wave measurement; 2 to 4000 GHz; CPW; MMIC; all-optical testing; arbitrary frequency periodic signals; circuit under test; clock signal; direct optical excitation; electrooptic sampling; field mapping; field-dependent optical nonlinearity; freely positionable photoconductive probes; frequency range; high-frequency devices; high-frequency electric signal detection; high-frequency electric signal generation; high-frequency electric signal synchronization; high-frequency microelectronic devices; invasiveness; linearity; local electric field measurement; modular optoelectronic measurement system; on-chip electric-pulse generation; optoelectronic on-chip characterization; photoconductive probe tips; sensitivity; substrate material; time resolution; ultrafast electric devices; Circuit testing; Electric variables measurement; Frequency; Nonlinear optics; Optical sensors; Photoconducting devices; Photoconducting materials; Probes; Signal generators; Ultrafast optics;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.571758