DocumentCode
1455554
Title
Radiation response of a MEMS accelerometer: an electrostatic force
Author
Edmonds, L.D. ; Swift, G.M. ; Lee, C.I.
Author_Institution
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
Volume
45
Issue
6
fYear
1998
fDate
12/1/1998 12:00:00 AM
Firstpage
2779
Lastpage
2788
Abstract
Particle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage. An earlier conclusion, that a dielectric below the sensor becomes charged, is extended by quantifying the effect of this charge on device output. It is shown that an electrostatic force is consistent with the observation that the output voltage shift is independent of acceleration. Possible charging mechanisms are suggested. An appendix derives a convenient algorithm for calculating electrostatic forces, which may also be used for other MEMS devices
Keywords
accelerometers; microsensors; proton effects; ADXL50 microelectromechanical accelerometer; MEMS device; algorithm; dielectric charging; electrostatic force; mechanical sensor; particle irradiation; radiation response; voltage shift; Accelerometers; Capacitors; Circuits; Dielectric substrates; Electrostatics; Impedance; Micromechanical devices; Position measurement; Space technology; Voltage;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/23.736528
Filename
736528
Link To Document