Title :
Radiation effects on surface micromachined comb drives and microengines
Author :
Schanwald, L.P. ; Schwank, J.R. ; Sniegowsi, J.J. ; Walsh, D.S. ; Smith, N.F. ; Peterson, K.A. ; Shaneyfelt, M.R. ; Winokur, P.S. ; Smith, J.H. ; Doyle, B.L.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
12/1/1998 12:00:00 AM
Abstract :
Surface micromachined comb drive and microengine fluence thresholds and failure modes were investigated in X-ray, electron, and proton total-dose environments. Very high fluence levels were necessary to induce motion degradation or lockup for normal device biasing or operation. For the abnormal biasing of ungrounded or partially grounded dice, significantly lower fault thresholds were observed, but still in a medium or high fluence range
Keywords :
X-ray effects; electron beam effects; microactuators; micromachining; proton effects; MEMS actuator; X-ray irradiation; comb drive; electron irradiation; failure mode; fluence threshold; lockup; microengine; motion degradation; proton irradiation; surface micromachining; total dose environment; Accelerometers; Actuators; Capacitive sensors; Etching; Micromechanical devices; Protons; Radiation effects; Rough surfaces; Surface roughness; Video recording;
Journal_Title :
Nuclear Science, IEEE Transactions on
