DocumentCode :
1455624
Title :
Forced convection boiling in a microchannel heat sink
Author :
Jiang, Linan ; Wong, Man ; Zohar, Yitshak
Author_Institution :
Dept. of Mech. Eng., Hong Kong Univ., Hong Kong
Volume :
10
Issue :
1
fYear :
2001
fDate :
3/1/2001 12:00:00 AM
Firstpage :
80
Lastpage :
87
Abstract :
Micromachining technology was utilized to fabricate a transparent microchannel heat-sink system by bonding glass to a silicon wafer. The micro heat sink consisted of a microchannel array, a heater, and a temperature sensor array. This integrated microsystem allowed simultaneous qualitative visualizations of the flow pattern within the microchannels and quantitative measurements of temperature distributions, flow rates, and input power levels. Boiling curves of temperature as a function of the input power were established. No boiling plateau was observed in the boiling curves, consistent with our previously reported data but different from results reported for macrochannel heat sinks. Three stable boiling modes, depending on the input power level, have been distinguished from the flow patterns. Local nucleation boiling was observed in microchannels with a hydraulic diameter as small as 26 μm at the lower input power range. At the higher input power range, a stable annular flow was the dominant boiling mode. Bubbly flow, commonly observed in macrochannels, could not be developed in the present microchannels. Consequently, no boiling plateau was detected in the boiling curves
Keywords :
boiling; forced convection; heat sinks; microfluidics; micromachining; temperature distribution; 26 micron; boiling curves; dominant boiling mode; flow pattern; flow rates; forced convection boiling; hydraulic diameter; input power level; input power levels; local nucleation boiling; microchannel array; microchannel heat sink; qualitative visualizations; stable annular flow; temperature distributions; temperature sensor array; Data visualization; Glass; Heat sinks; Microchannel; Micromachining; Power measurement; Sensor arrays; Silicon; Temperature sensors; Wafer bonding;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/84.911095
Filename :
911095
Link To Document :
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