Title :
High-accuracy analog Hall probe
Author :
Schott, Christian ; Blanchard, Hubert ; Popovic, Rade S. ; Racz, Robert ; Hrejsa, Jan
Author_Institution :
Inst. for Microsyst., Swiss Federal Inst. of Technol., Lausanne, Switzerland
fDate :
4/1/1997 12:00:00 AM
Abstract :
A Hall probe has been developed in the form of a miniaturized analog system, consisting of two silicon vertical Hall devices, current stabilizers, amplifiers, and error-correcting circuits. The output signal has a calibrated sensitivity of 1 V/T, with a residual error less than 10-4 in the ranges ±2 T, (15-35)°C, and dc to 10 kHz. The probe features high long-term stability, low-offset drift, and low noise
Keywords :
Hall effect devices; calibration; elemental semiconductors; error correction; magnetometers; measurement errors; probes; silicon; -2 to 2 T; 0 to 10 kHz; 15 to 35 degC; Si; analog Hall probe; calibrated sensitivity; current stabilizers; error-correcting circuits; long-term stability; low-offset drift; magnetometry; miniaturized analog system; noise; residual error; vertical Hall devices; Fabrication; Hall effect devices; Magnetic materials; Magnetic noise; Magnetic sensors; Magnetometers; Probes; Semiconductor device noise; Silicon; Temperature sensors;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
