Title :
Guided-wave acoustooptic interaction with phase modulation in a ZnO thin-film transducer on an Si-based integrated Mach-Zehnder interferometer
Author :
Bonnotte, E. ; Gorecki, Christophe ; Toshiyoshi, Hiroshi ; Kawakatsu, H. ; Fujita, H. ; Wörhoff, Kerstin ; Hashimoto, K.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
fDate :
1/1/1999 12:00:00 AM
Abstract :
This paper presents the design and the realization of a novel integrated Mach-Zehnder interferometer (MZI) with heterodyne scheme. Well-controlled machining as well as ZnO thin-film transducer integration on the same Si substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation. Theoretical and experimental results are presented, demonstrating that an efficient sensor can be designed and fabricated
Keywords :
Mach-Zehnder interferometers; acousto-optical devices; electro-optical modulation; integrated optics; micro-optics; micromachining; optical films; optical sensors; phase modulation; silicon; transducers; Si; Si-based integrated Mach-Zehnder interferometer; ZnO; ZnO thin-film transducer; ZnO thin-film transducer integration; active device; guided-wave acoustooptic interaction; heterodyne scheme; integrated Mach-Zehnder interferometer; n; optical sensor design; optically passive device; phase modulation; sinusoidal phase modulation; Acoustic transducers; Integrated optics; Machining; Optical devices; Optical mixing; Phase modulation; Semiconductor thin films; Substrates; Thin film devices; Zinc oxide;
Journal_Title :
Lightwave Technology, Journal of
