Design of shapes for precise image registration

This correspondence deals with the problem of designing planar shapes for subpixel image registration. Basic theoretical considerations are shown to lead to a lower bound on location accuracy. Optimal registration marks achieving this bound are discussed. These optimal designs, however, require very high printing or etching resolution and are inherently very sensitive to variations in the image sampling model (like scaling of grid size and rotation). More robust, optimal and suboptimal “topology-preserving” registration marks are then introduced and analyzed