Title :
Characterization of the slot antenna microwave plasma source
Author :
Wu, Cong-Feng ; Zhan, Ru-Juan ; Wen, Xiao-Hui ; Huang, Wei-Dong
Author_Institution :
Structure Res. Lab., Univ. of Sci. & Technol. of China, Hefei, China
fDate :
2/1/2001 12:00:00 AM
Abstract :
An annular ring slot antenna is used as the generation of large-volume 2.45-GHz microwave plasma. With argon, a surface wave at the quartz tube can be excited above 250 W. Optical emissions testify the existence of azimuthal modes of m=4 at a pressure of 10 Pa and m=6 at a pressure of 230 Pa. An important conclusion that the uniformity of electromagnetic field in plasma has a dependence on the value of plasma density has been acquired based on theoretical calculations under low pressures. Meanwhile, the efficiency of the plasma source is investigated experimentally. Especially, the spatial distribution of plasma parameter show that homogeneous plasma cylinder with a diameter of 160 mm has been successfully produced at the pressure of 10-1000 Pa
Keywords :
Langmuir probes; antennas in plasma; argon; plasma density; plasma electromagnetic wave propagation; plasma pressure; plasma production; slot antennas; 10 Pa; 10 to 1000 Pa; 160 mm; 2.45 GHz; 230 Pa; 250 W; Ar; annular ring slot antenna; azimuthal modes; efficiency; electromagnetic field; homogeneous plasma cylinder; large-volume microwave plasma; optical emissions; plasma; plasma density; plasma parameter; plasma source; pressure; quartz tube; slot antenna microwave plasma source; spatial distribution; surface wave; uniformity; Argon; Microwave antennas; Microwave generation; Optical surface waves; Plasma density; Plasma sources; Plasma waves; Slot antennas; Stimulated emission; Surface waves;
Journal_Title :
Plasma Science, IEEE Transactions on
