DocumentCode
1460189
Title
ICMTS´96
Volume
10
Issue
2
fYear
1997
fDate
5/1/1997 12:00:00 AM
Keywords
CMOS integrated circuits; Contamination; Electron mobility; Flash memory; Integrated circuit testing; MOSFETs; Neural networks; Optical scattering; Pollution measurement; Semiconductor process modeling;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.1997.572065
Filename
572065
Link To Document