• DocumentCode
    1460189
  • Title

    ICMTS´96

  • Volume
    10
  • Issue
    2
  • fYear
    1997
  • fDate
    5/1/1997 12:00:00 AM
  • Keywords
    CMOS integrated circuits; Contamination; Electron mobility; Flash memory; Integrated circuit testing; MOSFETs; Neural networks; Optical scattering; Pollution measurement; Semiconductor process modeling;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.1997.572065
  • Filename
    572065