DocumentCode :
1460195
Title :
Guest Editorial ICMTS´96
Author :
Jeppson, K.O. ; Walton, A.J.
Author_Institution :
Chalmers University of Technology Goteborg, Sweden
Volume :
10
Issue :
2
fYear :
1997
fDate :
5/1/1997 12:00:00 AM
Firstpage :
194
Lastpage :
195
Keywords :
Circuit testing; MOS devices; MOSFETs; Microelectronics; Parameter extraction; Plasma measurements; Semiconductor device manufacture; Semiconductor device modeling; Solid state circuits; Very large scale integration;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.1997.572066
Filename :
572066
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1460195
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