The Factory Integration Roadmap in Semiconductor manufacturing

The International Technology Roadmap for Semiconductors (ITRS) is probably the single most important document governing the direction of the semiconductor manufacturing industry. The Factory Integration (FI) chapter seeks to define a roadmap for semiconductor factories and enterprise systems. This roadmap has gone through a significant revision over the past 2 years with a focus on commonality, integration, and data driven. New sub-chapters have been created for prediction, big data, and control systems architectures. Challenges and potential solutions have been identified for each of these sub-chapters, some of which are common across industries, and others of which are unique to the semiconductor manufacturing industry.