A DC-to-40 GHz four-bit RF MEMS true-time delay network

Author

Kim, M. ; Hacker, J.B. ; Mihailovich, R.E. ; DeNatale, J.F.

Author_Institution

Dept. of Electr. Eng., Korea Univ., Seoul, South Korea

Volume

11

Issue

2

fYear

2001

Firstpage

56

Lastpage

58

Abstract

A monolithic true-time delay (TTD) network containing sixteen metal-to-metal contact RF microelectromechanical systems (MEMS) switches has been successfully fabricated and characterized. The TTD network was designed to produce flat delay time over a dc-to-40 GHz bandwidth with full 360-degree phase control at 22.5-degree intervals at 10.8 GHz. Measurements show a close match to the designed delay times for all sixteen switch states with 2.2 to 2.6 dB of insertion loss at 10 GHz. The worst group delay ripple in the dc-to-30 GHz range was 3 ps, well within the single bit delay time of 5.8 ps.

Keywords

MMIC; delay circuits; losses; micromechanical devices; microwave phase shifters; microwave switches; 0 to 40 GHz; 2.2 to 2.6 dB; 5.8 ps; bit delay time; flat delay time; group delay ripple; insertion loss; metal-to-metal contact RF MEMS switches; monolithic true-time delay network; phase control; switch states; Bandwidth; Contacts; Delay effects; Fabrication; Micromechanical devices; Microswitches; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/7260.914301

Filename

914301