Low-loss micromachined inverted overlay CPW lines with wide impedance ranges and inherent airbridge connection capability

Author

Kwon, Youngwoo ; Kim, Hong-Teuk ; Park, Jae-Hyoung ; Kim, Yong-Kweon

Author_Institution

Sch. of Electr. Eng., Seoul Nat. Univ., South Korea

Volume

11

Issue

2

fYear

2001

Firstpage

59

Lastpage

61

Abstract

A new type of overlay coplanar waveguide (CPW) structure, "inverted overlay CPW (IOCPW)" is developed using micromachining techniques to provide easy means of airbridge connection between the ground planes, as well as to achieve low losses over wide impedance ranges. Measured IOCPW showed less than 1 dB/cm loss at 50 GHz over a wide impedance range from 25 to 80 /spl Omega/. It also offered low effective dielectric constant, and insensitivity to the substrate losses. Wide impedance ranges and simple process steps make IOCPW a promising uniplanar transmission line medium for mm-wave monolithic applications.

Keywords

MIMIC; coplanar waveguides; micromachining; permittivity; 25 to 80 ohm; 50 GHz; airbridge connection capability; effective dielectric constant; ground planes; impedance ranges; micromachined inverted overlay CPW lines; mm-wave monolithic applications; process steps; substrate losses; uniplanar transmission line medium; Coplanar waveguides; Dielectric constant; Dielectric loss measurement; Dielectric measurements; Dielectric substrates; Impedance measurement; Loss measurement; Micromachining; Planar waveguides; Transmission line measurements;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/7260.914302

Filename

914302