Title :
Temperature dependence of threshold voltage fluctuations in CMOS transistors incorporating halo implant
Author :
Edwards, Hal ; Niu Jin ; Fan-Chi Hou ; Choi, Li Jen ; Krakowski, Tracey ; Joardar, Kuntal
Author_Institution :
Texas Instrum., Inc., Dallas, TX, USA
Abstract :
We report a device physics theory and compact model that predicts the threshold voltage mismatch for CMOS transistors using the halo implant. This model is able to fit CMOS VT mismatch across temperature and device geometry, validating the underlying physical argument. A bias method is presented and shown to recover part of the matching degradation due to the halo implant.
Keywords :
CMOS analogue integrated circuits; integrated circuit modelling; ion implantation; semiconductor doping; CMOS VT mismatch; CMOS transistors; bias method; compact model; device physics theory; halo implant; temperature dependence; threshold voltage fluctuations; threshold voltage mismatch; CMOS integrated circuits; Doping; Implants; Mathematical model; Semiconductor device modeling; Threshold voltage; Transistors; CMOS analog integrated circuits; Differential amplifiers; Transistors;
Conference_Titel :
Solid State Device Research Conference (ESSDERC), 2014 44th European
Conference_Location :
Venice
Print_ISBN :
978-1-4799-4378-4
DOI :
10.1109/ESSDERC.2014.6948848
