Optimized silicon antiresonant reflecting optical waveguides for sensing applications

Author

Prieto, F. ; Lechuga, L.M. ; Calle, A. ; Llobera, A. ; Domínguez, C.

Author_Institution

Centro Nacional de Microelectronica, CSIC, Madrid, Spain

Volume

19

Issue

1

fYear

2001

fDate

1/1/2001 12:00:00 AM

Firstpage

75

Lastpage

83

Abstract

The development of an evanescent field sensor with an integrated Mach-Zehnder interferometric (MZI) configuration requires the fabrication of optical waveguides with two main characteristics: (1) monomode behavior and (2) high surface sensitivity for sensing biomolecular interactions in a direct way (without labels). In this paper, we present an experimental study for the optimization of the different parameters of the waveguides that will be the basis of a highly sensitive optical sensor. After optimization, an MZI sensor has been fabricated and some sensing applications are shown. The designed waveguides are based on antiresonant reflecting optical waveguide (ARROW) structures and are fabricated with standard silicon technology

Keywords

Mach-Zehnder interferometers; integrated optics; optical design techniques; optical fabrication; optical sensors; optical waveguides; optimisation; reflectivity; sensitivity; silicon; ARROW; MZI sensor; Si antiresonant reflecting optical waveguide optimisation; antiresonant reflecting optical waveguide; biomolecular interactions; evanescent field sensor; high surface sensitivity; highly sensitive optical sensor; integrated Mach-Zehnder interferometric configuration; monomode behavior; optical waveguide fabrication; sensing applications; standard silicon technology; Biomedical optical imaging; Biosensors; Integrated optics; Optical device fabrication; Optical interferometry; Optical sensors; Optical surface waves; Optical waveguides; Sensor phenomena and characterization; Silicon;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.914488

Filename

914488