DocumentCode
1462602
Title
Inside front cover
Author
Ishizuka, Hiroyasu ; Okuyama, Kousuke ; Kubota, Katsuhiko ; Komuro, Masamichi ; Hara, Yuji
Author_Institution
Hatachi ULSI Syst. Co., Tokyo, Japan
Volume
21
Issue
4
fYear
1998
Abstract
We examined various electrostatic discharge (ESD) protection devices for input pins in the case of floating body substrates to discuss optimal structures effective to both of the machine model (MM) and human body model (HBRM) ESD stresses. Because of a small series resistance, we observed oscillation alternating from positive to negative in the current waveforms during MM stress, leading to weak polarity dependence of ESD performance which is inconsistent with the results for HEM tests. As a result, protection devices effective to both HEM and MM should be robust to bipolar stress. As one of the candidates, we propose a combination of PN diode and thyristor.
Keywords
bipolar transistors; electrostatic discharge; integrated circuit testing; protection; semiconductor diodes; thyristors; ESD protection device; HBM test; MM test; PN diode; discharge; floating body substrate; human body model; input pin; lateral bipolar transistor; machine model; thyristor; Biological system modeling; Diodes; Electrostatic discharge; Humans; Immune system; Pins; Protection; Robustness; Stress; Testing;
fLanguage
English
Journal_Title
Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on
Publisher
ieee
ISSN
1083-4400
Type
jour
DOI
10.1109/3476.739170
Filename
739170
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