Simultaneous estimation of sample surface topography and elasticity utilizing contact-mode AFM

Author

Watanabe, Shigetaka ; Fujimoto, Hiroshi

Author_Institution

Dept. of Electr. Eng., Univ. of Tokyo, Kashiwa, Japan

fYear

2014

fDate

14-16 March 2014

Firstpage

55

Lastpage

60

Abstract

Atomic Force Microscope (AFM) is the device which can be applied to measure the surface topography of samples in nano-scale. Because the cantilever holds its physical contact with samples, it is also possible to measure elasticity of samples in principle. However, compared with the implovement of scanning performance, the technologies for viscosity and elasticity measurements are still underdeveloped. The proposal method measures the surface topography in forward scan (FWS) and the elasticity in backward scan (BWS). Furthermore, this paper introduces Surface Topography Observer (STO) and Perfect Tracking Control (PTC) in order to improve accuracy of the measurement.

Keywords

atomic force microscopy; elasticity; mechanical variables measurement; surface topography measurement; atomic force microscope; backward scan; contact-mode AFM; elasticity measurement; forward scan; perfect tracking control; surface topography measurement; surface topography observer; Accuracy; Elasticity; Measurement by laser beam; Observers; Surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Motion Control (AMC),2014 IEEE 13th International Workshop on

Conference_Location

Yokohama

Type

conf

DOI

10.1109/AMC.2014.6823257

Filename

6823257