Force-sensorless bilateral control using piezoelectric cantilever with Nonlinearity Compensation

In the research about force sensorless bilateral control using piezoelectric cantilever, nonlinearities of piezoelectric constant and creep phenomenon has not been considered in reaction force observer (RFOB). Therefore, there are room for improvement of the performance of force estimation. In this paper, piezoelectric constant and creep phenomenon are modeled based on experimental results and built into RFOB to improve the performance of reaction force estimation. The validity of proposed method is confirmed through experiments of micro-macro bilateral control between linear motor and piezoelectric cantilever.