DocumentCode :
1464343
Title :
High- \\kappa {\\rm Tm}_{2}{\\rm Ti}_{2}{\\rm O}_{7} Electrolyte-Insulator-Semiconductor Crea
Author :
Pan, Tung-Ming ; Lin, Chao-Wen ; Lin, Wan-Ying ; Wu, Min-Hsien
Author_Institution :
Dept. of Electron. Eng., Chang Gung Univ., Taoyuan, Taiwan
Volume :
11
Issue :
10
fYear :
2011
Firstpage :
2388
Lastpage :
2394
Abstract :
In this study, we developed an electrolyte-insulator-semiconductor (EIS) device-incorporating a high-κ Tm2Ti2O7 sensing membrane deposited on a Si substrate through co-sputtering-for pH measurement and creatinine detection. We used X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy to investigate the structural and morphological features of the Tm2Ti2O7 film. For pH measurement, this high-κ Tm2Ti2O7 EIS device exhibited high sensitivity [58.45 mV/pH (at values of solution pH from 2 to 12)], a low hysteresis voltage [4.3 mV (pH 7→4→7→10→7)], a small drift rate [0.595 mV/h (in buffer solution at pH 7)], and good stability (operation time: 120 days). The sensitivity of a creatinine deiminase-immobilized EIS biosensor was 82.39 mV/pCcreatinine for creatinine concentrations ranging from 0.01 to 15 mM.
Keywords :
X-ray diffraction; X-ray photoelectron spectra; atomic force microscopy; biomedical equipment; biosensors; chemical sensors; enzymes; high-k dielectric thin films; molecular biophysics; organic compounds; pH measurement; patient diagnosis; semiconductor devices; semiconductor-insulator boundaries; sputter deposition; surface morphology; thulium compounds; Tm2Ti2O7 EIS creatinine biosensor; Tm2Ti2O7 film morphological features; Tm2Ti2O7 film structural features; X-ray diffraction; X-ray photoelectron spectroscopy; atomic force microscopy; cosputtering; creatinine deiminase immobilized EIS biosensor; creatinine detection; electrolyte-insulator-semiconductor creatinine biosensor; high-kappa Tm2Ti2O7 sensing membrane; hysteresis voltage; pH 2 to 12; pH measurement; silicon substrate; time 120 day; voltage 4.3 mV; Biosensors; Films; Silicon; Substrates; X-ray diffraction; Biosensor; creatinine; electrolyte-insulator-semiconductor (EIS); high-$kappa$ ${rm Tm}_{2}{rm Ti}_{2}{rm O}_{7}$ ;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2011.2122255
Filename :
5723683
Link To Document :
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