Title :
Electrostatically actuated 1×2 micromechanical optic switch
Author :
Shubin, I. ; Wa, P.L.K.
Author_Institution :
Central Florida Univ., Orlando, FL, USA
fDate :
3/29/2001 12:00:00 AM
Abstract :
A micro-opto-mechanical 1×3 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many potential applications in fibre-optic local area networks
Keywords :
electro-optical switches; integrated optoelectronics; micro-optics; micromechanical devices; optical communication equipment; optical fibre LAN; optical planar waveguides; silicon compounds; SiON; SiON planar waveguide technology; cantilever beam; electrostatic interaction; electrostatically actuated 1×2 micromechanical optic switch; fibre-optic local area networks; mechanical deflection; micro-opto-mechanical 1×3 switch; monolithically integrated; operational principle; silicon oxynitride; silicon substrate;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010301
