A 2-MHz 2-kW voltage-source inverter for low-temperature plasma generators: implementation of fast switching with a third-order resonant circuit

This paper presents a specially designed third-order resonant circuit intended to achieve fast switching operation for a voltage-source series-resonant inverter using four MOSFETs. The third-order resonant current superimposed on a sinusoidal load current helps to quickly charge or discharge the output capacitance of each MOSFET. This results not only in a reduction of the commutation period which is required to turn the MOSFET on and off, but also in an improvement of the displacement factor at the output of the inverter. Moreover, the third-order resonant circuit acts as a low-pass filter to suppress the parasitic oscillation between line inductance and stray capacitance. The viability and effectiveness of the third-order resonant circuit is verified by a 2 MHz 2 kW prototype inverter developed for a low-temperature plasma generator