Title :
Alpha-particle-induced collected charge model in SOI-DRAM´s
Author :
Satoh, Shigeo ; Tosaka, Yoshiharu ; Suzuki, Kunihiro ; Itakura, Toru
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
fDate :
2/1/1999 12:00:00 AM
Abstract :
We have developed a model for collected charges induced by an alpha-particle for SOI-DRAMs which assumes that the body capacitance equals the gate capacitance and that holes do not recombine with electrons. The validity of our model was supported by three-dimensional (3-D) device simulations that considered various gate lengths, gate oxide thicknesses, and flat-band voltages. The work function difference between the gate and body materials caused a significant increase in the current gain. The vertical band of the body region should therefore be flat to suppress the collected charge. A thinner gate oxide would also suppress the collected charge during a refresh interval. This finding could not be obtained from the conventional equation
Keywords :
DRAM chips; alpha-particle effects; capacitance; circuit simulation; integrated circuit modelling; silicon-on-insulator; 3D device simulations; SOI-DRAM; alpha-particle-induced collected charge model; body capacitance; current gain; flat-band voltages; gate capacitance; gate lengths; gate oxide thicknesses; refresh interval; work function difference; Bipolar transistors; Body regions; Capacitance; Charge carrier processes; Electrons; Equations; Impurities; MOSFET circuits; Spontaneous emission; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on