• DocumentCode
    1467596
  • Title

    Semiconducting YBaCuO pyroelectric infrared detectors on suspended Si3N4 films

  • Author

    Gray, J.E. ; Butler, Donald P. ; Celik-Butler, Zeynep

  • Author_Institution
    Dept. of Electr. Eng., Southern Methodist Univ., Dallas, TX
  • Volume
    34
  • Issue
    22
  • fYear
    1998
  • fDate
    10/29/1998 12:00:00 AM
  • Firstpage
    2164
  • Lastpage
    2166
  • Abstract
    Uncooled, micromachined pyroelectric infrared detectors based on semiconducting YBaCuO were fabricated and characterised at room temperature. The detectors were fabricated with CMOS compatible techniques that demonstrate a future ability to fabricate low-cost focal plane arrays. Pyroelectric coefficients were measured to be as high as 4.1 μC/cm2K and detectivities over 108·cm Hz1/2/W were measured
  • Keywords
    pyroelectric detectors; CMOS compatible techniques; IR detectivities; YBaCuO-Si3N4; focal plane arrays; micromachining; polycrystalline thin films; pyroelectric infrared detector; suspended Si3N4 films;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19981455
  • Filename
    741381
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1467596